Oldham had the better chances, but both goalkeepers were in defiant form to ensure a stalemate.
Exeter were first to threaten as Richard Duffy and Richard Logan forced an impressive double save from Oldham keeper Alex Cisak.
But Chris Taylor headed just over for the Latics, Tom Adeyemi fired inches wide and visiting stopper Artur Krysiak brilliantly tipped James Wesolowski's drive on to the bar.
Krysiak also saved Robbie Simpson's long-range free-kick before Cisak denied Jake Taylor with his legs.
Filipe Morais was the next to be denied by Krysiak, who showed fine reactions at his near post, but Oldham were guilty of poor finishing through Morais, Taylor and Matt Smith.
The visitors also had late openings, but subs Daniel Nardiello and John O'Flynn were unable to convert.
Any reproduction, publication or redistribution of this material without the written agreement of 365 Media Group is strictly forbidden.